| By kind | Kind/ Capacity | Feature | |
|---|---|---|---|
| Thermal spray facility | HVSFS | porosity-free thin-film thermal spray coating layer | |
| HVOF | High-speed powder thermal spray equipment | ||
| Plasma | VPS | Plasma thermal spray equipment in vacuum | |
| APS | Plasma thermal spray equipment in the atmosphere | ||
| ARC | Wire thermal spray equipment with arc as a heating source, mass storage | ||
| GAS | Wire thermal spray equipment with gas flame as a heating source | ||
| Short facility | Steel Grit SiC, Al2O3 |
|
|
| Grinding and Polishing Equipment | 1,000 X 3,500L Large Diameter Film Type Supper Follishing |
SNK64 NC Machine 2,000 above Ra 0.04 below |
|
| Measurement and Inspection Equiment |
|
Measurement of dimensions and measurement of physical electrical properties of thin films | |
| Etc. | Vacuum impregnation chamber Driving system for large roll coating | 400⌽× 1200L 4000⌽×7000L(50ton) | |