Vacuum plasma spray (VPS) is a type of atmospheric Plasma spray (APS) that uses plasma-spray at anaerobic vacuum atmosphere condition or particular gas atmosphere for thin film heat-resistance, wear resistance, and insulation coatings.

Generating a thin film by using plasma in anaerobic environment or particular gas atmosphere, not only provides the environment that excludes generation of oxides but also it also protects the thin film from oxidation and increases its density.

A turning chamber and auto-feeding device were developed for thin-film coating at various scales in a small chamber to maximize the use of space allowing other equipments to be installed in a relatively small space.